Interferometer for microregion measurements – characterization of shape and optical parameters of microelements

Łukasiewicz Research Network – Tele and Radio Research Institute, has started the project: Interferometer for microregion measurements – characterization of shape and optical parameters of microelements, effective 30.06.2022.

Project implemented under the program: Polish Metrology

Project Objective:

The goal of the research project is to develop and validate an interferometric measurement technique with continuously variable wavelength, i.e. Variable Wavelength Interferometry-VAWI, enabling accurate measurement of thickness patterns, depth of surface faults, pits and convexities, with the ability to map these structures. Later in the project, a new interferometer in a reflection configuration will be developed to enable the above measurements with the additional ability to characterize optical features of objects (refractive indices, birefringence), including wave plates. It is expected that the new instrument will have both a measurement range and uncertainty significantly exceeding the values of previously used measurement instruments, while at the same time having high temperature stability of measurements and their resistance to external factors, including vibrations.

Total value of the Project: 869,000.00 PLN

Funding value: PLN 869,000.00

The project is funded by the Ministry of Education and Science.

All information about the project will be provided:

Dariusz Litwin
tel: 22-590-74-71

e-mail: dariusz.litwin@itr.lukasiewicz.gov.pl

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